Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
209-212 |
| DOI |
10.4028/www.scientific.net/SSP.134.209 |
| Citation |
Ji Hoon Cha et al., 2007, Solid State Phenomena, 134, 209 |
| Online since |
November, 2007 |
| Authors |
Ji Hoon Cha, Chang Sup Mun, Dae Hyuk Kang, Woo Gwan Shim, Kun Tack Lee, Chang Ki Hong, Han Ku Cho, Joo Tae Moon |
| Keywords |
Cleaning, HF, Megasonic, Particle, Recess, SC-1, Silicon |
| Full Paper |
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