Paper Title:
Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
209-212
DOI
10.4028/www.scientific.net/SSP.134.209
Citation
J. H. Cha, C. S. Mun, D. H. Kang, W. G. Shim , K. T. Lee, C. K. Hong, H. K. Cho, J. T. Moon, "Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic ", Solid State Phenomena, Vol. 134, pp. 209-212, 2008
Online since
November 2007
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