Paper Title:
Preparation, Characterization, and Damage-Free Processing of Advanced Multiple-Gate FETs
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
213-216
DOI
10.4028/www.scientific.net/SSP.134.213
Citation
J. M. Lauerhaas, R. Cleavelin, W. Z. Xiong, K. Mochizuki, K. Sherman, H. C. Lee, B. Clappin, T. Schulz, K. Schruefer, "Preparation, Characterization, and Damage-Free Processing of Advanced Multiple-Gate FETs", Solid State Phenomena, Vol. 134, pp. 213-216, 2008
Online since
November 2007
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$32.00
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