Paper Title:
Impact of Re-Gasified Water on Megasonic Cleaning
  Abstract

Megasonic cleaning using de-gassed water (less than 2ppm N2, O2, CO2) in a 300mm batch immersion tool often does not give optimal particle performance, with particle streaks and clusters added onto the wafer, and low particle removal efficiency (PRE). When water was re-gasified with N2, the resultant stable cavitation activity reduced particle adders and increased PRE. With N2 concentration increased to just above 5ppm, number of particle adders decreased by three folds. Optimal particle performance could be obtained by operating at an N2 level close to saturation.

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
217-220
DOI
10.4028/www.scientific.net/SSP.134.217
Citation
B. C. Goh, F. Goh, C. Lim, Z. Ismail, M. S. Zhou, "Impact of Re-Gasified Water on Megasonic Cleaning ", Solid State Phenomena, Vol. 134, pp. 217-220, 2008
Online since
November 2007
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Price
$32.00
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