Electrical Impact of Various Arsenic-Residues Cleanings
|Periodical||Solid State Phenomena (Volume 134)|
|Main Theme||Ultra Clean Processing of Semiconductor Surfaces VIII|
|Edited by||Paul Mertens, Marc Meuris and Marc Heyns|
|Citation||Y.S. Tan et al., 2007, Solid State Phenomena, 134, 23|
|Online since||November 2007|
|Authors||Y.S. Tan, S.P. Chiew, Z. Yang, Zainab Ismail, Felicia Goh, Christopher Lim, Vincent Sih, Ee Ping Yu, Goh Boon Cheng|
|Keywords||Arsenic Residues, Pre Silicidation Clean|
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