Paper Title:

Electrical Impact of Various Arsenic-Residues Cleanings

Periodical Solid State Phenomena (Volume 134)
Main Theme Ultra Clean Processing of Semiconductor Surfaces VIII
Edited by Paul Mertens, Marc Meuris and Marc Heyns
Pages 23-26
DOI 10.4028/
Citation Y.S. Tan et al., 2007, Solid State Phenomena, 134, 23
Online since November 2007
Authors Y.S. Tan, S.P. Chiew, Z. Yang, Zainab Ismail, Felicia Goh, Christopher Lim, Vincent Sih, Ee Ping Yu, Goh Boon Cheng
Keywords Arsenic Residues, Pre Silicidation Clean
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