Electrical Impact of Various Arsenic-Residues Cleanings |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
23-26 |
| DOI |
10.4028/www.scientific.net/SSP.134.23 |
| Online since |
November, 2007 |
| Authors |
Y.S. Tan,
S.P. Chiew,
Z. Yang,
Zainab Ismail,
Felicia Goh,
Christopher Lim,
Vincent Sih,
Ee Ping Yu,
Goh Boon Cheng
|
| Keywords |
Arsenic Residues, Pre Silicidation Clean |
| Full Paper |
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