Paper Title:
Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions
  Abstract

Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %.

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
237-240
DOI
10.4028/www.scientific.net/SSP.134.237
Citation
S. H. Lee, T. G. Kim, T. Y. Kwon, J. G. Park, S. I. Bae, G. H. Lee, I. J. Kim, "Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions", Solid State Phenomena, Vol. 134, pp. 237-240, 2008
Online since
November 2007
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