Paper Title:
Challenges of Single-Wafer Wet Cleaning for Low Temperature Pre-Epitaxial Treatment of SiGe
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
243-246
DOI
10.4028/www.scientific.net/SSP.134.243
Citation
K. Sano, F. E. Leys, G. Dilliway, R. Loo, P. W. Mertens, J. Snow, A. Izumi, A. Eitoku, "Challenges of Single-Wafer Wet Cleaning for Low Temperature Pre-Epitaxial Treatment of SiGe", Solid State Phenomena, Vol. 134, pp. 243-246, 2008
Online since
November 2007
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