Paper Title:
Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
251-254
DOI
10.4028/www.scientific.net/SSP.134.251
Citation
H. Fontaine, M. Veillerot, "Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage", Solid State Phenomena, Vol. 134, pp. 251-254, 2008
Online since
November 2007
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Price
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