Paper Title:
A Study on Germanium as a Contaminant Source in Semiconductor Fabrication Process
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
255-258
DOI
10.4028/www.scientific.net/SSP.134.255
Citation
D. W. Hwang, J. S. Lee, P. K. Jun, Y. K. Lee, S. K. Chae, "A Study on Germanium as a Contaminant Source in Semiconductor Fabrication Process ", Solid State Phenomena, Vol. 134, pp. 255-258, 2008
Online since
November 2007
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Price
$32.00
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