Paper Title:
Elimination of Watermark on Extremely High-Doped Poly-Silicon Surfaces Using HF-Vapor Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
27-30
DOI
10.4028/www.scientific.net/SSP.134.27
Citation
Kang Heon Lee et al., 2007, Solid State Phenomena, 134, 27
Online since
November 2007
Price
US$ 28,-
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