Paper Title:
Investigation of Metallic Contamination Analysis Using Vapor Phase Decomposition – Droplet Collection – Total Reflection X-Ray Fluorescence (VPD-DC-TXRF) for Pt-Group Elements on Silicon Wafers
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
273-276
DOI
10.4028/www.scientific.net/SSP.134.273
Citation
D. Hellin, N. Valckx, J. Rip, S. De Gendt, C. Vinckier, "Investigation of Metallic Contamination Analysis Using Vapor Phase Decomposition – Droplet Collection – Total Reflection X-Ray Fluorescence (VPD-DC-TXRF) for Pt-Group Elements on Silicon Wafers ", Solid State Phenomena, Vol. 134, pp. 273-276, 2008
Online since
November 2007
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