Paper Title:
X-Ray Spectrometry for Wafer Contamination Analysis and Speciation as Well as for Reference-Free Nanolayer Characterization
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
277-280
DOI
10.4028/www.scientific.net/SSP.134.277
Citation
B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser, G. Ulm, "X-Ray Spectrometry for Wafer Contamination Analysis and Speciation as Well as for Reference-Free Nanolayer Characterization ", Solid State Phenomena, Vol. 134, pp. 277-280, 2008
Online since
November 2007
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