Paper Title:
Advanced TXRF Analysis: Background Reduction when Measuring High-k Materials and Mapping Metallic Contamination
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
285-288
DOI
10.4028/www.scientific.net/SSP.134.285
Citation
C. Sparks, J. Barnett, D. K. Michelson, C. Gondran, S. C. Song, A. Martinez, H. Takahara, H. Murakami, T. Kinashi, "Advanced TXRF Analysis: Background Reduction when Measuring High-k Materials and Mapping Metallic Contamination", Solid State Phenomena, Vol. 134, pp. 285-288, 2008
Online since
November 2007
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