Paper Title:
Etching of Silicon Dioxide with Gas Phase HF and Water: Initiation, Bulk Etching, and Termination.
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
3-6
DOI
10.4028/www.scientific.net/SSP.134.3
Citation
Gerardo Montaño-Miranda et al., 2007, Solid State Phenomena, 134, 3
Online since
November 2007
Price
US$ 28,-
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