Paper Title:
A Novel Surface Cleaning for Copper Interconnection Using Ammonium Decomposed Species Generated by Hot Wire
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
307-310
DOI
10.4028/www.scientific.net/SSP.134.307
Citation
A. Izumi, T. Ueno, "A Novel Surface Cleaning for Copper Interconnection Using Ammonium Decomposed Species Generated by Hot Wire ", Solid State Phenomena, Vol. 134, pp. 307-310, 2008
Online since
November 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Surina Othman, F.K. Yam, Abu Hassan Haslan, Hassan Zainuriah
Abstract:In this study, we investigated the contact characteristics of bi-layer thin films, Ag (200nm)/Ti (100nm) on Si-doped n-type Al0.27Ga0.73N...
281
Authors: Hyoun Woo Kim, Ju Hyun Myung
Abstract:Indium oxide (In2O3) films was deposited on TiN substrates by the metal organic chemical vapor deposition technique using a triethylindium...
760
Authors: Y.Y. Zhu, Z.B. Fang, C. Liao, Shu Chen, Z.M. Jiang
Abstract:Synchrotron radiation photoemission spectroscopy was used to study the initial growth of Er2O3 films on Si in O2 pressures of 7×10-6 Torr....
625
Authors: Xin Wang, Hui Jia, Wei Tao Zheng, Wei Xu, Bei Hong Long
Abstract:Fe-Co-N thin films with various Co content were synthesized on Si (111) substrate using facing-target magnetron sputtering by changing...
635
Authors: Koichiro Inaba, Yujin Takemoto, Kouji Toyota, Kenichi Haga, Kouichi Tokudome, Masato Shinmiya, Naomi Kamiya, Minoru Oshima, Kenji Yoshino
Chapter 6: Functional Oxides and Other Materials
Abstract:A novel precursor for ZnO film deposition with Zn-O structure was synthesized by the reaction of diethylzinc and water in some ether...
277