Paper Title:
Effects of Bias, Pressure and Temperature in Plasma Damage of Ultra Low-k Films
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
317-320
DOI
10.4028/www.scientific.net/SSP.134.317
Citation
A.M. Urbanowicz, A. Humbert, G. Mannaert, Z. Tokei, M. R. Baklanov, "Effects of Bias, Pressure and Temperature in Plasma Damage of Ultra Low-k Films ", Solid State Phenomena, Vol. 134, pp. 317-320, 2008
Online since
November 2007
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