Passivation Studies of Germanium Surfaces |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
33-36 |
| DOI |
10.4028/www.scientific.net/SSP.134.33 |
| Citation |
Jung Yup Kim et al., 2007, Solid State Phenomena, 134, 33 |
| Online since |
November, 2007 |
| Authors |
Jung Yup Kim, Jim McVittie, Krishna Saraswat, Yoshio Nishi |
| Keywords |
Cleaning, Germanium, HBr, HCl, HF, HI, Passivation, X-Ray Photoelectron Spectroscopy (XPS) |
| Full Paper |
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