Passivation Studies of Germanium Surfaces |
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| Journal | Solid State Phenomena (Volume 134) |
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| Volume | Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 33-36 |
| DOI | 10.4028/www.scientific.net/SSP.134.33 |
| Online since | November, 2007 |
| Authors | Jung Yup Kim, Jim McVittie, Krishna Saraswat, Yoshio Nishi |
| Keywords | Cleaning, Germanium, HBr, HCl, HF, HI, Passivation, X-Ray Photoelectron Spectroscopy (XPS) |
| Full Paper | 
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