Paper Title:
Effect of Pressure Pulsation on Post-Etch Photoresist Stripping on Low-k Films in Supercritical CO2
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
341-344
DOI
10.4028/www.scientific.net/SSP.134.341
Citation
H. Kiyose, K. Saito, I. Mizobata, T. Iwata, S. Hirae, K. Saga, H. Kuniyasu, T. Hattori, "Effect of Pressure Pulsation on Post-Etch Photoresist Stripping on Low-k Films in Supercritical CO2", Solid State Phenomena, Vol. 134, pp. 341-344, 2008
Online since
November 2007
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