AlCu Metal Line Corrosion: A Case Study |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
367-370 |
| DOI |
10.4028/www.scientific.net/SSP.134.367 |
| Citation |
Francesco Pipia et al., 2007, Solid State Phenomena, 134, 367 |
| Online since |
November, 2007 |
| Authors |
Francesco Pipia, Annamaria Votta, Gloria Obetti, Enrico Bellandi, Mauro Alessandri, Thomas Nolan |
| Keywords |
Aluminum Corrosion, Sidewall Polymer |
| Full Paper |
Get the full paper by clicking here
|
