Germanium Surface Passivation Using Ozone Gaseous Phase |
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| Journal | Solid State Phenomena (Volume 134) |
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| Volume | Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 37-40 |
| DOI | 10.4028/www.scientific.net/SSP.134.37 |
| Online since | November, 2007 |
| Authors | Virginie Loup, Pascal Besson, Olivier Pollet, Eugénie Martinez, Emmanuelle Richard, Sandrine Lhostis |
| Keywords | Germanium, Ozone, Surface Passivation |
| Full Paper | 
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