Paper Title:
Influence of the Process Conditions of a Polishing Rinse after CuCMP
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
375-378
DOI
10.4028/www.scientific.net/SSP.134.375
Citation
A. Filippini, S. Petitdidier, C. Trouiller, A. Couvrat, M. C. Luche, E. Sabouret, "Influence of the Process Conditions of a Polishing Rinse after CuCMP", Solid State Phenomena, Vol. 134, pp. 375-378, 2008
Online since
November 2007
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