Paper Title:
Surface Microroughness of Silicon in Wet Process and its Minimization
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
45-48
DOI
10.4028/www.scientific.net/SSP.134.45
Citation
H. Morinaga, K. Shimaoka, T. Ohmi, "Surface Microroughness of Silicon in Wet Process and its Minimization", Solid State Phenomena, Vol. 134, pp. 45-48, 2008
Online since
November 2007
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