Paper Title:
Oxidation of Si Surface Utilizing SCCO2
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
49-52
DOI
10.4028/www.scientific.net/SSP.134.49
Citation
K. Saito, T. Kitajima, M. Kohno, I. Mizobata, T. Iwata, S. Hirae, "Oxidation of Si Surface Utilizing SCCO2", Solid State Phenomena, Vol. 134, pp. 49-52, 2008
Online since
November 2007
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