Paper Title:
Single-Wafer Wet Chemical Oxide Formation for Pre-ALD High-k Deposition on 300 mm Wafer
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
53-56
DOI
10.4028/www.scientific.net/SSP.134.53
Citation
K. Sano, A. Izumi, A. Eitoku, J. Snow, L. Nyns, S. Kubicek, R. Singanamalla, O. Richard, T. Conard, R. Vos, P. W. Mertens, "Single-Wafer Wet Chemical Oxide Formation for Pre-ALD High-k Deposition on 300 mm Wafer", Solid State Phenomena, Vol. 134, pp. 53-56, 2008
Online since
November 2007
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