Etch Rate Profile Characterization of High-κ Materials |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
63-66 |
| DOI |
10.4028/www.scientific.net/SSP.134.63 |
| Citation |
Annamaria Votta et al., 2007, Solid State Phenomena, 134, 63 |
| Online since |
November, 2007 |
| Authors |
Annamaria Votta, Enrico Bellandi, Rosella Piagge, Massimo Caniatti, Francesco Pipia, Mauro Alessandri |
| Keywords |
Aluminium, Etch Rate Profiles, Hafnia, Hafnium Aluminates, High-k Materials |
| Full Paper |
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