Paper Title:
Etch Rate Profile Characterization of High-κ Materials
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
63-66
DOI
10.4028/www.scientific.net/SSP.134.63
Citation
A. Votta, E. Bellandi, R. Piagge, M. Caniatti, F. Pipia, M. Alessandri, "Etch Rate Profile Characterization of High-κ Materials", Solid State Phenomena, Vol. 134, pp. 63-66, 2008
Online since
November 2007
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