Paper Title:

Evaluation of the Plasmaless Gaseous Etching Process

Periodical Solid State Phenomena (Volume 134)
Main Theme Ultra Clean Processing of Semiconductor Surfaces VIII
Edited by Paul Mertens, Marc Meuris and Marc Heyns
Pages 7-10
DOI 10.4028/
Citation Yoshiya Hagimoto et al., 2007, Solid State Phenomena, 134, 7
Online since November 2007
Authors Yoshiya Hagimoto, Hajime Ugajin, Daisuke Miyakoshi, Hayato Iwamoto, Yusuke Muraki, Takehiko Orii
Keywords COR, Divot, Plasmaless Gaseous Etching, STI
Price US$ 28,-
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