Evaluation of the Plasmaless Gaseous Etching Process |
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| Journal | Solid State Phenomena (Volume 134) |
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| Volume | Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 7-10 |
| DOI | 10.4028/www.scientific.net/SSP.134.7 |
| Online since | November, 2007 |
| Authors | Yoshiya Hagimoto, Hajime Ugajin, Daisuke Miyakoshi, Hayato Iwamoto, Yusuke Muraki, Takehiko Orii |
| Keywords | COR, Divot, Plasmaless Gaseous Etching, STI |
| Full Paper | 
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