Evaluation of the Plasmaless Gaseous Etching Process |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
7-10 |
| DOI |
10.4028/www.scientific.net/SSP.134.7 |
| Citation |
Yoshiya Hagimoto et al., 2007, Solid State Phenomena, 134, 7 |
| Online since |
November, 2007 |
| Authors |
Yoshiya Hagimoto, Hajime Ugajin, Daisuke Miyakoshi, Hayato Iwamoto, Yusuke Muraki, Takehiko Orii |
| Keywords |
COR, Divot, Plasmaless Gaseous Etching, STI |
| Full Paper |
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