Paper Title:
Evaluation of the Plasmaless Gaseous Etching Process
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
7-10
DOI
10.4028/www.scientific.net/SSP.134.7
Citation
Y. Hagimoto, H. Ugajin, D. Miyakoshi, H. Iwamoto, Y. Muraki, T. Orii, "Evaluation of the Plasmaless Gaseous Etching Process", Solid State Phenomena, Vol 134, pp. 7-10, Nov. 2007
Online since
November 2007
Price
US$ 28,-
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