Surface Preparation Challenge on Nitrided Gate Oxides |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
71-74 |
| DOI |
10.4028/www.scientific.net/SSP.134.71 |
| Citation |
Philippe Garnier et al., 2007, Solid State Phenomena, 134, 71 |
| Online since |
November, 2007 |
| Authors |
Philippe Garnier, David Barge, Jerome Bienacel, Brice Tavel, Nicolas Cabuil, Didier Lévy, Kathy Barla |
| Keywords |
Nitrided Oxide, Nitrogen Concentration Profile, Triple Gate Oxide |
| Full Paper |
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