Development of a New TaN Etchant for Metal Gate |
| Journal |
Solid State Phenomena (Volume 134) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces VIII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
75-78 |
| DOI |
10.4028/www.scientific.net/SSP.134.75 |
| Citation |
Mong Sup Lee et al., 2007, Solid State Phenomena, 134, 75 |
| Online since |
November, 2007 |
| Authors |
Mong Sup Lee, Sang Yong Kim, Ji Hoon Cha, Jeong Nam Han, Im Soo Park, Kun Tack Lee, Chang Ki Hong, Han Ku Cho, Joo Tae Moon |
| Keywords |
High-k Layer, Metal Gate, TaN, Wet Etching Processes |
| Full Paper |
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