Paper Title:
Development of a New TaN Etchant for Metal Gate
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
75-78
DOI
10.4028/www.scientific.net/SSP.134.75
Citation
M. S. Lee, S. Y. Kim, J. H. Cha, J. N. Han, I. S. Park, K. T. Lee, C. K. Hong, H. K. Cho, J. T. Moon, "Development of a New TaN Etchant for Metal Gate", Solid State Phenomena, Vol. 134, pp. 75-78, 2008
Online since
November 2007
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