Paper Title:
Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics
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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
79-82
DOI
10.4028/www.scientific.net/SSP.134.79
Citation
M. Guder, B. O. Kolbesen, C. Delattre, C. Fischer, H. Schier, G. Wagner, "Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics", Solid State Phenomena, Vol. 134, pp. 79-82, 2008
Online since
November 2007
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