Paper Title:
Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions
  Abstract

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Periodical
Solid State Phenomena (Volume 134)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
87-90
DOI
10.4028/www.scientific.net/SSP.134.87
Citation
S. Garaud, R. Vos, D. Shamiryan, V. Paraschiv, P. W. Mertens, J. Fransaer, S. De Gendt, "Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions ", Solid State Phenomena, Vol. 134, pp. 87-90, 2008
Online since
November 2007
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