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Authors: Jae Yong Park, Jong Kook Song, Han Mil Kim, Hee Kang Cho, Tae Gyun Kim, Bong Ho Moon, Eun Su Rho, Leo Archer, Won Ho Cho
177
Authors: Alexander Pfeuffer, Wolfgang Bensch, Alfred Lechner, Harald Okorn-Schmidt
181
Authors: Hiroshi Tomita, Yuji Yamada, Hidenobu Nagashima, Norio Ishikawa, Yumiko Taniguchi
185
Authors: D. Martin Knotter, Roy Te Brake, Michiel Enkelaar
189
Authors: Guy Vereecke, T. Veltens, Atsuro Eitoku, Kenichi Sano, G. Doumen, Wim Fyen, Kurt Wostyn, James Snow, Paul W. Mertens
Abstract:Cleaning of nano-particles is becoming a major challenge in semiconductor manufacturing as efficient particle removal must be achieved...
193
Authors: Frank Holsteyns, Tom Janssens, Sophia Arnauts, Wouter Van der Putte, Vincent Minsier, Johann Brunner, Joachim Straka, Paul W. Mertens
201
Authors: Hajime Ugajin, Hayato Iwamoto, Eiji Hide, Nobuyasu Hiraoka, Tsuyoshi Okumura
205
Authors: Ji Hoon Cha, Chang Sup Mun, Dae Hyuk Kang, Woo Gwan Shim, Kun Tack Lee, Chang Ki Hong, Han Ku Cho, Joo Tae Moon
209
Authors: Jeffrey M. Lauerhaas, Rinn Cleavelin, Wei Ze Xiong, Koki Mochizuki, Kara Sherman, Hu Cheng Lee, Brian Clappin, Thomas Schulz, Klaus Schruefer
213
Showing 41 to 50 of 89 Paper Titles