Paper Title
Page
Authors: Twan Bearda, Gabriela Catana, David Hellin, Rita Vos
259
Authors: Masayuki Wada, T. Sueto, H. Takahashi, N. Hayashi, Atsuro Eitoku
263
Authors: Adrien Danel, Yannick Borde, Marc Veillerot, Nicolas Cabuil, H. Kono, M. Yamagami
269
Authors: Burkhard Beckhoff, R. Fliegauf, Michael Kolbe, M. Müller, B. Pollakowski, J. Weser, Gerhard Ulm
277
Authors: Thierry Conard, Scott List, Martine Claes, Burkhard Beckhoff
281
Authors: Chris Sparks, Joel Barnett, Diane K. Michelson, Carolyn Gondran, Seung Chul Song, Angela Martinez, Hikari Takahara, Hiroyuki Murakami, Toru Kinashi
285
Authors: Robert Bryant, Joel Hickson, Jeff Hawthorne
289
Authors: Ja Hyung Han, Ja Eung Koo, Kyo Se Choi, Byung Lyul Park, Ju Hyuk Chung, Sang Rok Hah, Sun Yong Lee, Young Jae Kang, Jin Goo Park
Abstract:The prevention of watermark defect after copper/low-k CMP is a critical barrier for the successful integration of sub-100 nm devices. The...
295
Authors: Sébastien Petitdidier, Kyle Bartosh, Chantal Trouiller, Alexandre Couvrat, Jun Liu, Mark Zaleski
299
Showing 61 to 70 of 89 Paper Titles