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Colloidal Crystal Templating of Two-Dimensional Ordered Macroporous SiCN Ceramics

Journal Solid State Phenomena (Volume 135)
Volume Nanocomposites and Nanoporous Materials VIII
Edited by Chang Kyu Rhee
Pages 27-30
DOI 10.4028/www.scientific.net/SSP.135.27
Citation In Hyuck Song et al., 2008, Solid State Phenomena, 135, 27
Online since February, 2008
Authors In Hyuck Song, Yong Jin Kim, Hai Doo Kim, Dong Pyo Kim
Keywords Porous Material, Preceramic Polymer, SiCN, Silica Template
Abstract

In this study, two-dimensional (2D) ordered macroporous SiCN ceramics were prepared by infiltrating sacrificial colloidal silica (SiO2) templates with the low molecular weight preceramic polymer, polysilazane. This was followed by a thermal curing step, pyrolysis at 1250°C in a N2 atmosphere, and finally the removal of the templates by etching with diluted HF. In particular, 100large-scale monolayer silica crystals were prepared on the cleaned Si substrates by spin coating. Two-dimensional SiCN ordered pore arrays were fabricated by a solution-dipping template strategy.

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