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Ultra Clean Processing of Semiconductor Surfaces IX

Solid State Phenomena Volumes 145 - 146

• Papers
• Abstracts

• p-4 Acknowledgements   [ 401 K ]
• p-3 Committees and Sponsors   [ 35 K ]
• p-2 Photo   [ 337 K ]
• p-1 Preface   [ 32 K ]
• p3 Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning   [ 1 M ]
  Authors: Hiroshi Tomita, Minako Inukai, Kaori Umezawa, Li Nan Ji
• p7 High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall   [ 453 K ]
  Authors: Aaldert Zijlstra, Tom Janssens, Kurt Wostyn, Michel Versluis, Paul W. Mertens, Detlef Lohse
• p11 Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential   [ 1 M ]
  Authors: Andrea Otto, Till Nowak, Robert Mettin, Frank Holsteyns, Alexander Lippert
• p15 Impact of Megasonic Activation with Different Chemistries on Silicon Surface in Single Wafer Tool   [ 641 K ]
  Authors: Guillaume Briend, Pascal Besson, Thierry Salvetat, Sébastien Petitdidier
• p19 Impacts of Ionization Potentials and Megasonic Dispersion   [ 339 K ]
  Authors: Cole Franklin
• p23 The Influence of Standing Waves on Cleaning with a Megasonic Nozzle   [ 185 K ]
  Authors: Tom Janssens, G. Doumen, S. Halder, Kurt Wostyn, Paul W. Mertens, Joachim Straka
• p27 Megasonic Sweeping and Silicon Wafer Cleaning   [ 623 K ]
  Authors: J.M. Goodson, R. Nagarajan
• p31 Removal of Nano-Particles by Aerosol Spray: Effect of Droplet Size and Velocity on Cleaning Performance   [ 205 K ]
  Authors: K. Xu, S. Pichler, Kurt Wostyn, G. Cado, C. Springer, Glenn W. Gale, Michael Dalmer, Paul W. Mertens, Twan Bearda, E. Gaulhofer, D. Podlesnik
• p35 High Aspect Ratio Contact Clean Study in 58nm Flash Device   [ 1 M ]
  Authors: Pi Chun Yu, Cheng Kuen Chen, Jin Lang Lin, Chih Ning Wu, Hiroshi Matsuo
• p39 High Velocity Aerosol Cleaning with Organic Solvents: Particle Removal and Substrate Damage   [ 965 K ]
  Authors: Michael T. Andreas, Kurt Wostyn, Masayuki Wada, Tom Janssens, Karine Kenis, Twan Bearda, Paul W. Mertens
• p43 Cleaning Technique Using High-Speed Steam-Water Mixed Spray   [ 736 K ]
  Authors: Masao Watanabe, Toshiyuki Sanada, Atsushi Hayashida, Yoichi Isago