Main Theme:

Ultra Clean Processing of Semiconductor Surfaces IX

Volumes 145 - 146
doi: 10.4028/www.scientific.net/SSP.145-146
Paper Titles published in this Main Theme:
Paper Title Page

Acknowledgements

Committees and Sponsors

Photo

Preface

Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning

Authors: Hiroshi Tomita, Minako Inukai, Kaori Umezawa, Li Nan Ji

3

High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall

Authors: Aaldert Zijlstra, Tom Janssens, Kurt Wostyn, Michel Versluis, Paul W. Mertens, Detlef Lohse

7

Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential

Authors: Andrea Otto, Till Nowak, Robert Mettin, Frank Holsteyns, Alexander Lippert

11

Impact of Megasonic Activation with Different Chemistries on Silicon Surface in Single Wafer Tool

Authors: Guillaume Briend, Pascal Besson, Thierry Salvetat, Sébastien Petitdidier

15

Impacts of Ionization Potentials and Megasonic Dispersion

Authors: Cole Franklin

19

The Influence of Standing Waves on Cleaning with a Megasonic Nozzle

Authors: Tom Janssens, G. Doumen, S. Halder, Kurt Wostyn, Paul W. Mertens, Joachim Straka

23

Showing 1 to 10 of 91 Paper Titles