Paper Title:
Molybdenum Contamination in Silicon: Detection and Impact on Device Performances
  Abstract

In this paper, a case of molybdenum contamination from wet cleaning is discussed, and various techniques are compared for their ability to detect molybdenum. In addition, the impact of this sort of contamination on the electrical results of a bipolar device is studied.

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
123-126
DOI
10.4028/www.scientific.net/SSP.145-146.123
Citation
D. Codegoni, M. L. Polignano, D. Caputo, A. Riva, E. Blot, D. Coulon, P. Maillot, N. Pic, "Molybdenum Contamination in Silicon: Detection and Impact on Device Performances", Solid State Phenomena, Vols. 145-146, pp. 123-126, 2009
Online since
January 2009
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Price
$32.00
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