Paper Title:
Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments
  Abstract

As a result of shrinking dimensions and technology nodes, nanoelectronics manufacturing and handling processes demand growing requirements to the cleanliness of the air inside cleanrooms and microenvironments. Besides the limitation of particle contamination, the limitation of airborne molecular contamination (AMC) is necessary to ensure yield and quality of nanoelectronics production lines.

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
135-138
DOI
10.4028/www.scientific.net/SSP.145-146.135
Citation
M. Otto, A. Leibold, L. Wulf, M. Hurlebaus, L. Pfitzner, "Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments", Solid State Phenomena, Vols. 145-146, pp. 135-138, 2009
Online since
January 2009
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Price
$32.00
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