Paper Title:
A Novel Vapor Phase Etching Process for Si
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
239-242
DOI
10.4028/www.scientific.net/SSP.145-146.239
Citation
S. Verhaverbeke, "A Novel Vapor Phase Etching Process for Si", Solid State Phenomena, Vols. 145-146, pp. 239-242, 2009
Online since
January 2009
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