Paper Title:
Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures
  Abstract

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Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
257-260
DOI
10.4028/www.scientific.net/SSP.145-146.257
Citation
A. C. Elbaz, E. Bellandi, C. De Marco, L. M. Avaro, E. Ravizza, R. Piva, M. Alessandri, "Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures", Solid State Phenomena, Vols. 145-146, pp. 257-260, 2009
Online since
January 2009
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