Paper Title:
Megasonic Sweeping and Silicon Wafer Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
27-30
DOI
10.4028/www.scientific.net/SSP.145-146.27
Citation
J.M. Goodson, R. Nagarajan, "Megasonic Sweeping and Silicon Wafer Cleaning", Solid State Phenomena, Vols. 145-146, pp. 27-30, 2009
Online since
January 2009
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$32.00
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