Megasonic Sweeping and Silicon Wafer Cleaning |
| Journal |
Solid State Phenomena (Volumes 145 - 146) |
| Volume |
Ultra Clean Processing of Semiconductor Surfaces IX |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
27-30 |
| DOI |
10.4028/www.scientific.net/SSP.145-146.27 |
| Citation |
J.M. Goodson et al., 2009, Solid State Phenomena, 145-146, 27 |
| Online since |
January, 2009 |
| Authors |
J.M. Goodson, R. Nagarajan |
| Keywords |
Cleaning, Contamination Control, Megasonic, Particle Count, Sweep, Wafer Processing |
| Full Paper |
Get the full paper by clicking here
|
