Paper Title:
Ozone Chemistry for BEOL Resist Stripping – A Systematic Analytical Attempt to Understand the Interaction of O3 with Modern DUV-Resists
  Abstract

This work deals with the application of ozonated water for the BEOL stripping of DUV-resists. For this purpose analytical techniques for the quantification of molecular O3 in the water as well as methods for the non-destructive analysis of resists on wafers have been studied. The aim is to be able to determine the concentrations of O3, its decomposition, under the influence of various parameters, and to correlate these data with the polymer structure of the resist on the wafer and the efficiency of resist removal.

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
311-314
DOI
10.4028/www.scientific.net/SSP.145-146.311
Citation
M. Guder, M. Pellowska, M. Pohland, M. Dalmer, B. O. Kolbesen, "Ozone Chemistry for BEOL Resist Stripping – A Systematic Analytical Attempt to Understand the Interaction of O3 with Modern DUV-Resists", Solid State Phenomena, Vols. 145-146, pp. 311-314, 2009
Online since
January 2009
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$32.00
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