Paper Title:
Applications of Electrostatic Spray Techniques to Surface Cleaning
  Abstract

Conventional cleaning technologies have been effective in removal of particles, metals, and organic films. However, two trends motivating the development of new techniques are 1) the desire to minimize the environmental impact of large volumes of cleaning solutions; and 2) the need to clean at the sub-45 nm level, consistent with decreasing feature sizes. We report here on the initial characterization of a system to apply electrospray techniques to variants of the SC-1 and SC-2 solutions, as well as to solvent mixtures. We describe the generation of submicron sized droplets (<1 m radius) of cleaning mixtures and demonstrate a preliminary methodology, using a combination of experimental data and phenomenological modeling approaches, to characterize the physics of the droplet-surface interaction

  Info
Periodical
Solid State Phenomena (Volumes 145-146)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
51-54
DOI
10.4028/www.scientific.net/SSP.145-146.51
Citation
K. Finster, R. Small, A. Belz, J. Mahoney, J. Perel, J. Gong, "Applications of Electrostatic Spray Techniques to Surface Cleaning", Solid State Phenomena, Vols. 145-146, pp. 51-54, 2009
Online since
January 2009
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Price
$32.00
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