Dislocation Engineering in Multicrystalline Silicon |
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| Journal | Solid State Phenomena (Volumes 156 - 158) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology XIII |
| Edited by | M. Kittler and H. Richter |
| Pages | 11-18 |
| DOI | 10.4028/www.scientific.net/SSP.156-158.11 |
| Citation | Mariana I. Bertoni et al., 2009, Solid State Phenomena, 156-158, 11 |
| Online since | October, 2009 |
| Authors | Mariana I. Bertoni, Clémence Colin, Tonio Buonassisi |
| Keywords | Annihilation, Dislocations, High-Temperature Anneal, mc-Si, Ribbon Silicon |
| Abstract | Dislocations are known to be among the most deleterious performance-limiting defects in multicrystalline silicon (mc-Si) based solar cells. In this work, we propose a method to remove dislocations based on a high temperature treatment. Dislocation density reductions of >95% are achieved in commercial ribbon silicon with a double-sided silicon nitride coating via high temperature annealing under ambient conditions. The dislocation density reduction follows temperature-dependent and time-dependent models developed by Kuhlmann et al. for the annealing of dislocations in face-centered cubic metals. It is believed that higher annealing temperatures (>1170°C) allow dislocation movement unconstrained by crystallographic glide planes, leading to pairwise dislocation annihilation within minutes. |
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