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Dislocation Engineering in Multicrystalline Silicon

Journal Solid State Phenomena (Volumes 156 - 158)
Volume Gettering and Defect Engineering in Semiconductor Technology XIII
Edited by M. Kittler and H. Richter
Pages 11-18
DOI 10.4028/www.scientific.net/SSP.156-158.11
Citation Mariana I. Bertoni et al., 2009, Solid State Phenomena, 156-158, 11
Online since October, 2009
Authors Mariana I. Bertoni, Clémence Colin, Tonio Buonassisi
Keywords Annihilation, Dislocations, High-Temperature Anneal, mc-Si, Ribbon Silicon
Abstract

Dislocations are known to be among the most deleterious performance-limiting defects in multicrystalline silicon (mc-Si) based solar cells. In this work, we propose a method to remove dislocations based on a high temperature treatment. Dislocation density reductions of >95% are achieved in commercial ribbon silicon with a double-sided silicon nitride coating via high temperature annealing under ambient conditions. The dislocation density reduction follows temperature-dependent and time-dependent models developed by Kuhlmann et al. for the annealing of dislocations in face-centered cubic metals. It is believed that higher annealing temperatures (>1170°C) allow dislocation movement unconstrained by crystallographic glide planes, leading to pairwise dislocation annihilation within minutes.

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