Paper Title:
Spatially Resolved Defect Analysis in Cz-Silicon after Copper-Nickel Co-Precipitation by Virtue of Light-Beam-Induced Current Measurements
  Abstract

We report on a light-beam-induced current (LBIC)-analysis of metal silicide defects arising from co-precipitation of copper and nickel in Cz-silicon-bicrystals produced by wafer direct bonding. Large colonies of silicide precipitates in the one wafer emerging from undisturbed growth from few nucleation sites were observed in different orientations with respect to the surface which correspond to Si {110} planes. From this, the colonies formed during copper-nickel co-precipitation reveal the same attributes as those colonies typical for copper precipitation in the absence of nickel. Oxygen related defects associated with a higher defect distribution in the other wafer were characterized by means of high resolution Transmission Electron Microscopy (TEM) and their temperature dependent LBIC signal.

  Info
Periodical
Solid State Phenomena (Volumes 156-158)
Edited by
M. Kittler and H. Richter
Pages
431-436
DOI
10.4028/www.scientific.net/SSP.156-158.431
Citation
P. Saring, C. Rudolf, L. Stolze, A. Falkenberg, M. Seibt, "Spatially Resolved Defect Analysis in Cz-Silicon after Copper-Nickel Co-Precipitation by Virtue of Light-Beam-Induced Current Measurements", Solid State Phenomena, Vols. 156-158, pp. 431-436, 2010
Online since
October 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Eun Hee Kim, Hyo Sook Lee, Hui Ping Shao
Abstract:Nanostructured iron and cobalt ferrite particles were prepared from iron chloride and cobalt chloride, respectively, using the sonochemical...
1044
Authors: Li Qiong An, Jian Zhang, Min Liu, Sheng Wu Wang
Abstract:Yb3+ and Ho3+ co-doped Lu2O3 nanocrystalline powders were synthesized by a reversestrike co-precipitation method. The as-prepared powders...
521
Authors: Min Zhou, Cheng Zhang, Wen Bo Bu, Lei Wang, Qiang Li
Abstract:By means of co-precipitation, pure YAG phase was synthesized from the reaction of aluminum yttrium and cerium nitrates with ammonia as...
429
Authors: M. Santiago T., H. Montiel, L.E. Hernández C., G. Álvarez, Maricela Villanueva-Ibáñez, M.A. Flores González
Abstract:We present a comparison between co-precipitation method and polyol mediated synthesis for obtaining sub-micrometric powders of...
139
Authors: G. Asghar, S. Nasir, M.S. Awan, G.H. Tariq, M. Akram, M. Anis-ur-Rehman
Abstract:Phase purity, particle size and its distribution contributes a lot to the physical properties of M-type hexa-ferrites. These parameters are...
201