Paper Title:
Investigation of the Mechanical Properties of Thin Films by Bulge Test
  Abstract

A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.

  Info
Periodical
Solid State Phenomena (Volumes 156-158)
Edited by
M. Kittler and H. Richter
Pages
477-482
DOI
10.4028/www.scientific.net/SSP.156-158.477
Citation
A. Hémel, A. Jacques, T. Schenk, T. Kruml, "Investigation of the Mechanical Properties of Thin Films by Bulge Test", Solid State Phenomena, Vols. 156-158, pp. 477-482, 2010
Online since
October 2009
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Price
$32.00
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