Paper Title:
Cathodoluminescence of SiO2/Si System
  Abstract

In this paper the new method for determination of luminescent centers concentration are discussed. While the possibility of electron traps determination and definition of its activation energy are suggested. The cathodoluminescent (CL) method was used. The determination of luminescent centers concentration in silicon oxide is based on the measurements of dependences of CL intensity on electron beam current. The presence and energy of activation of electron traps were studied by measurement of rise time and decay of luminescent band during the stationary irradiation of silica by electron beam.

  Info
Periodical
Solid State Phenomena (Volumes 156-158)
Edited by
M. Kittler and H. Richter
Pages
487-492
DOI
10.4028/www.scientific.net/SSP.156-158.487
Citation
M.V. Zamoryanskaya, "Cathodoluminescence of SiO2/Si System", Solid State Phenomena, Vols. 156-158, pp. 487-492, 2010
Online since
October 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: X.P. Zhu, Tsuneo Suzuki, Hisayuki Suematsu, Wei Hua Jiang, Koichi Niihara
Abstract:Nitriding of titanium was achieved in a vacuum of ~2×10-2 Pa by applying intense pulsed ion beam (IPIB) irradiation. Various phases including...
17
Authors: Yan Jin, Jian Jun Hu, Hong Bin Xu
Embedded System
Abstract:The electron beam polishing equipment technology is brought forward and its characteristic is explained because general processing method...
1555
Authors: Fatin Syazana Jamaludin, Mohd Faizul Mohd Sabri
Abstract:The aspect ratio of microholes milled on silicon by FIB/SEM milling was investigated with various beam currents and initial depths of mill....
436
Authors: Chen Ying Wang, Shu Ming Yang, Qi Jing Lin, Zhuang De Jiang
Chapter 2: Sensors, Measurement and Detection
Abstract:The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the...
842
Authors: Dong Hui Zhang, Chun Dong Liu, Landi Zhang, Zhan Ying Wang
Chapter 16: Laser Processing
Abstract:An experimental measuring method of flight trajectory of edge electron of the electron-beam in the electron gun of furnace was designed....
2388