Gettering and Defect Engineering in Semiconductor Technology XIII
Solid State Phenomena Volumes 156 - 158
doi:10.4028/www.scientific.net/SSP.156-158
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p187
The Effect of Germanium Doping on the Production of Carbon–Related Defects in Electron-Irradiated Czochralski Silicon
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184 K
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Authors: Charalamos A. Londos, A. Andrianakis, D. Aliprantis, Efstratia N. Sgourou, Valentin V. Emtsev, H. Ohyama
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p193
Numerical Analysis of mc-Si Crystal Growth
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463 K
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Authors: Koichi Kakimoto, Hitoshi Matsuo, Syo Hisamatsu, Birava Ganesh, Bing Gao, X.J. Chen, Li Jun Liu, Hiroaki Miyazawa, Yoshihiro Kangawa
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p199
Molecular Simulation on Interfacial Structure and Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates
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1007 K
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Authors: Hiroaki Kariyazaki, Tatsuhiko Aoki, Kouji Izunome, Koji Sueoka
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p205
Optimization of Silicon Ingot Quality by the Numerical Prediction of Bulk Crystal Defects
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162 K
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Authors: F. Loix, Francois Dupret, A. de Potter, R. Rolinsky, N. Van den Bogaert, V. Regnier
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p211
Rate Equation Modeling, Ab Initio Calculation, and High Sensitive FTIR Investigations of the Early Stages of Oxide Precipitation in Vacancy-Rich CZ Silicon
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1 M
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Authors: G. Kissinger, J. Dabrowski, V.D. Akhmetov, Andreas Sattler, D. Kot, Wilfried von Ammon
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p217
Thermal Optimization of Cz Silicon Single Crystal Growth
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283 K
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Authors: A.I. Prostomolotov, N.A. Verezub, M.G. Milvidskii
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p223
Simulation of Iron Distribution after Crystallization of mc Silicon
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1 M
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Authors: Jonas Schön, Holger Habenicht, Martin C. Schubert, Wilhelm Warta
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p229
Comparison of Efficiency and Kinetics of Phosphorus-Diffusion and Aluminum Gettering of Metal Impurities in Silicon: a Simulation study
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2 M
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Authors: M.A. Falkenberg, D. Abdelbarey, Vitaly V. Kveder, Michael Seibt
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p235
Effect of Growth Conditions and Catalyst Material on Nanowhisker Morphology: Monte Carlo Simulation
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436 K
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Authors: A.G. Nastovjak, I.G. Neizvestny, Nataly Shwartz
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p241
Versatile Simulation Tool and Novel Measurement Method for Electrical Characterization of Semiconductors
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549 K
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Authors: N. Schüler, Torsten Hahn, Kay Dornich, J.R. Niklas
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p247
Simulation of XBIC Contrast of Precipitates in Si
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149 K
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Authors: Eugene B. Yakimov
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p251
Dislocation Nucleation in Heteroepitaxial Semiconducting Films
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4 M
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Authors: Bernard Pichaud, N. Burle, Michael Texier, C. Fontaine, V.I. Vdovin
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p261
Impurity Engineering of Czochralski Silicon
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968 K
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Authors: Jia He Chen, Xiang Yang Ma, De Ren Yang
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p269
The Role of the Interstitial Oxygen in the Recovery and Evolution of the Boron Implantation Damage
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1 M
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Authors: Isabella Mica, Maria Luisa Polignano, F. Cazzaniga, L. Di Piazza, M. Mariani, E. Ricci, F. Sammiceli, S. Speranza
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p275
Oxygen Precipitation in Conventional and Nitrogen Co-Doped Heavily Arsenic-Doped Czochralski Silicon Crystals: Oswald Ripening
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568 K
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Authors: Xiang Yang Ma, Yan Feng, Yu Heng Zeng, De Ren Yang