Paper Title:
Design of a Low-Cost Submicron Measuring Probe
  Abstract

The paper presents a new low-cost probe design. The moving element of the probe head consists of the stylus and a cross-form intermediate body with a small aluminium enhanced mirror at the two ends and at the center. The intermediate body is suspended on four springs made of beryllium-copper foils. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by commercially available modified optical pick-ups.

  Info
Periodical
Solid State Phenomena (Volume 164)
Edited by
Andrejus H. Marcinkevičius and Algirdas V.Valiulis
Pages
195-200
DOI
10.4028/www.scientific.net/SSP.164.195
Citation
G. Hermann, "Design of a Low-Cost Submicron Measuring Probe", Solid State Phenomena, Vol. 164, pp. 195-200, 2010
Online since
June 2010
Authors
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