The Mechanism of Defects Formation in Silicon Substrates |
|
| Journal | Solid State Phenomena (Volume 165) |
|---|---|
| Volume | Mechatronic Systems and Materials: Materials Production Technologies |
| Edited by | Andrejus H. Marcinkevičius and Algirdas V.Valiulis |
| Pages | 7-12 |
| DOI | 10.4028/www.scientific.net/SSP.165.7 |
| Citation | A. Bogorosh et al., 2010, Solid State Phenomena, 165, 7 |
| Online since | June, 2010 |
| Authors | A. Bogorosh, S. Voronov, N. Višniakov, D. Ščekaturovienė, Algimantas Bubulis |
| Keywords | Defect Formation, Heterostructures on Silicon Substrate, Nanocrack, Navigating Electronic Device |
| Abstract | Components of navigating devices can be affected by acoustic emission and vibration. Therefore prototype samples and electronic components must be tested in such conditions. Heterostructures, which destructed under the action of external physical factors and kinetics of formations of porous defects in silicon substrates, were analyzed. |
| Full Paper | 
Get the full paper by clicking here
|
First page example
