A new method for studying multilayer structure using angle resolved XAFS measurements is proposed. The integral equation describing the relation between the fluorescence intensity for selective spectrum, the incident beam energy, the incident angle and a selective concentration profile, depth-dependent EXAFS has been derived. This integral Fredholm equation of the first kind belongs to the class of ill-posed problems and for the solution it needs special methods. We use the regularization Tikhonov method. The effectiveness of the proposed method was tested using the numerical simulations for trilayer system Cr-Fe-Cr. Some first experimental results for the thin films of pure Cr are also presented.