Abrasive machining is widely used as final machining process. It is still challenged to investigate the fundamental knowledge on the formation mechanism of groove and pile-up in single abrasive particle cutting. A 3D finite element analysis model to simulate single abrasive particle scratching on bearing steel (52100) workpiece with low cutting speed is proposed. An adaptive meshing technique is applied to handle large mesh deformation problem of the scratching process. The formation process of groove and pile-up for workpiece material is indentified qualitatively. The simulated results show that cutting speed has little effect on lateral profile. The height and area of pile-up increase with increase of depth of cut.