Paper Title:
Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors
  Abstract

A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.

  Info
Periodical
Solid State Phenomena (Volume 175)
Edited by
Xipeng Xu
Pages
357-361
DOI
10.4028/www.scientific.net/SSP.175.357
Citation
G. H. Li, P. Wu, X. L. Ni, W. F. Peng, G. Y. Tan, "Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors", Solid State Phenomena, Vol. 175, pp. 357-361, 2011
Online since
June 2011
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